Dryer（200mm FRD / 300RD）

Dryer Blue Printing
  • The method of drying by utilizing the existing Marangoni principle and Spray method
  • Effective & Stable IPA Vapor Supply
  • Equipment for cleaning using DIW
  • Minimization of W/F C/T Point
  • Hight Temp. IPA Process Possible
  • Wide Process Application（AR>10, DR<20mm）
Cassette-less／ Cassette

Good Drying Performance
－One substrate contact point (Knife type)
－Constant evaporation amount (Reliable vapor supply)
－Short vapor transfer distance (Effective vapor supply)
－No delay in supplying vapor right after N₂ supply

Simple Layout
－All in one type (No sub-module)
－Easy Maintenace
－Simple Operation

ESH Friendly
－Less IPA consumption due to short path
－No delay helps more TAT
－Fire protection; IPA heating via Hot DIW