Single Wet Scrubber This equipment is a device that uses DI water for cleaning. 2 ~ 8 Chambers 6″, 8″, 12″ Wafer Cleaning By Brushing CDS(Chemical Delivery System) Dryer(200mm FRD / 300RD)
Cleaning Process Filtration Solution
CMP Slurry Filtration Solution
Lithography Process Filtration Solution
DI-Water Filtration Solution
Liquid Filter Housings
Gas Filtration Solution
PVDF Pipe & Fitting
UF膜
NF膜
氣液分離膜接觸器
De-gasser產品
200L Drum
Telfon Tube
Teflon 膠條
DV310氣動薄膜閥
DV311手動薄膜閥
Single Wafer Cleaner
CDS(Chemical Delivery System)
Single Wet Scrubber
Dryer(200mm FRD / 300RD)